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arXiv:2110.08987 (physics)
[Submitted on 18 Oct 2021]

Title:A synchrotron-based kilowatt-level radiation source for EUV lithograph

Authors:Bocheng Jiang, Chao Feng, Changliang Li, Zhenghe Bai, Weishi Wan, Dao Xiang, Qiang Gu, Kun Wang, Qinglei Zhang, Dazhang Huang, Senyu Chen
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Abstract:A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. Rep. 7, 4724 (2017)]. Coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.
Subjects: Accelerator Physics (physics.acc-ph)
Cite as: arXiv:2110.08987 [physics.acc-ph]
  (or arXiv:2110.08987v1 [physics.acc-ph] for this version)
  https://doi.org/10.48550/arXiv.2110.08987

Submission history

From: Bocheng Jiang [view email]
[v1] Mon, 18 Oct 2021 02:43:13 UTC (1,852 KB)
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