AIM Process Design Kit (AIMPDKv2.0): Silicon Photonics Passive and Active Component Libraries on a 300mm Wafer.

Erman Timurdogan Zhan Su 0001 Christopher V. Poulton Matthew J. Byrd Simon Xin Ren-Jye Shiue Benjamin R. Moss Ehsan S. Hosseini Michael R. Watts AIM Process Design Kit (AIMPDKv2.0): Silicon Photonics Passive and Active Component Libraries on a 300mm Wafer. 1-3 2018 OFC https://ieeexplore.ieee.org/document/8385794 conf/ofc/2018 db/conf/ofc/ofc2018.html#Timurdogan0PBXS18