Bian Tian Qiuyue Yu Zhongkai Zhang 0003 Qijing Lin Na Zhao 0001 Weixuan Jing Zhuangde Jiang Measurement study of residual stress on tungsten-rhenium thin film thermocouples by nanoindentation technology. 800-803 2017 NEMS https://doi.org/10.1109/NEMS.2017.8017139 conf/nems/2017 db/conf/nems/nems2017.html#TianYZLZJJ17